@Article{Trava-AiroldiCBFBHRSC:2009:DeHaAd,
author = "Trava-Airoldi, Vladimir Jesus and Capote, Gil and Bonetti, L. F.
and Fernandes, J. and Blando, E. and Hubler, R. and Radi, P. A.
and Santos, L{\'u}cia Vieira and Corat, Evaldo Jos{\'e}",
affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto
Nacional de Pesquisas Espaciais (INPE)} and {} and {} and {} and
{} and {} and {Instituto Nacional de Pesquisas Espaciais (INPE)}
and {Instituto Nacional de Pesquisas Espaciais (INPE)}",
title = "Deposition of Hard and Adherent Diamond-Like Carbon Films Inside
Steel Tubes Using a Pulsed-DC Discharge",
journal = "Journal of Nanoscience and Nanotechnology",
year = "2009",
volume = "9",
number = "6",
pages = "3891--3897",
month = "June",
keywords = "Diamond-Like Carbon, Plasma-Enhanced Chemical Vapour Deposition,
Pulsed-DC Discharge, Inner Surface, Adhesion.",
abstract = "A new, low cost, pulsed-DC plasma-enhanced chemical vapor
deposition system that uses a bipolar, pulsed power supply was
designed and tested to evaluate its capacity to produce quality
diamondlike carbon films on the inner surface of steel tubes. The
main focus of the study was to attain films with low friction
coefficients, low total stress, a high degree of hardness, and
very good adherence to the inner surface of long metallic tubes at
a reasonable growth rate. In order to enhance the diamond-like
carbon coating adhesion to metallic surfaces, four steps were
used: (1) argon ion sputtering; (2) plasma nitriding; (3) a thin
amorphous silicon interlayer deposition, using silane as the
precursor gas; and (4) diamond-like carbon film deposition using
methane atmosphere. This paper presents various test results as
functions of the methane gas pressure and of the coaxial metal
anode diameter, where the pulsed-DC voltage constant is kept
constant. The influence of the coaxial metal anode diameter and of
the methane gas pressure is also demonstrated. The results
obtained showed the possibilities of using these DLC coatings for
reduced friction and to harden inner surface of the steel tubes.",
doi = "10.1166/jnn.2009.NS85",
url = "http://dx.doi.org/10.1166/jnn.2009.NS85",
issn = "1533-4880",
language = "en",
targetfile = "Comut 566431.pdf",
urlaccessdate = "13 maio 2024"
}